搜索结果: 1-1 共查到“机械学 MEMS”相关记录1条 . 查询时间(0.14 秒)
Novel Resonant Accelerometer with Micro Leverage Fabricated by MEMS Technology
accelerometer resonator micro-fabrication sensor
2011/8/4
For the purpose of improving the precision of the inertial guidance system, it is necessary to enhance the accuracy of the accelerometer. Combining the micro-fabrication processes with resonant sensor...