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Optimal temperature profiles for post-exposure bake of photoresist
Photo-Resist Baking Temperature-Profile Linear Programming Critical Dimensions
2015/8/11
In this paper it is shown how to compute optimal temperature profiles for post-exposure bake of photo-resist. The profiles are optimal in the sense that the worst case non-uniformity of the dissolutio...
Effect of exposure on material response of a swelling elastomer
Engineering polymers EPDM-type water-swelling elastomer Material characterization
2009/12/3
Purpose: This paper reports some results from a comparative study of the behavior of fresh and exposed samples of an EPDM-type water-swelling elastomer.
Design/methodology/approach: Experiments were ...
THE EFFECT OF LONG TERM EXPOSURE TO ELEVATED TEMPERATURE ON STEAM LINE STEEL PROPERTIES
fracture mechanics local approach ductile fracture
2009/10/13
Premature failure of pipes presents serious problem in the service of steaminess, produced of steel 14MoV6 3, developed for steam high temperature (540oC) for at least 100,000 service hours. Experimen...