搜索结果: 1-1 共查到“source mask optimization”相关记录1条 . 查询时间(0.125 秒)
Reduced basis method for source mask optimization
Reduced basis method source mask optimization
2010/11/16
Image modeling and simulation are critical to extending the limits of leading edge lithography technologies used for IC making. Simultaneous source mask optimization (SMO) has become an important obj...