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Compact, Thermally-Tuned Resonant Ring Muxes in CMOS with Integrated Backside Pyramidal Etch Pit
Compact Thermally-Tuned Resonant Ring Muxes CMOS Integrated Backside Pyramidal Etch Pit
2015/5/20
We present add-drop filters manufactured as ring resonators in commercial 130 nm SOI CMOS technology with thermal tuning. Their thermal impedance has been dramatically increased by the selective remov...